Microwave characterization of nanostructured ferroelectric Ba(0.6)Sr(0.4)TiO(3) thin films fabricated by pulsed laser deposition.

A series of nanostructured ferroelectric thin films of barium strontium titanate were fabricated using a pulsed laser deposition system with real-time in situ process control. Pulsed laser deposition parameters were controlled during the growth of nanostructured thin films for use in the development of high frequency tunable microwave devices. The thin films were all grown at the same substrate temperature and laser beam energy density, but the chamber oxygen partial pressure (COPP) was varied systematically from 19 mTorr through 1000 Torr.