Robust atomic force microscopy using multiple sensors.

Atomic force microscopy typically relies on high-resolution high-bandwidth cantilever deflection measurements based control for imaging and estimating sample topography and properties. More precisely, in amplitude-modulation atomic force microscopy (AM-AFM), the control effort that regulates deflection amplitude is used as an estimate of sample topography; similarly, contact-mode AFM uses regulation of deflection signal to generate sample topography. In this article, a control design scheme based on an additional feedback mechanism that uses vertical z-piezo motion sensor, which augments the deflection based control scheme, is proposed and evaluated.

Fast and robust control of nanopositioning systems: Performance limits enabled by field programmable analog arrays.

This paper aims at control design and its implementation for robust high-bandwidth precision (nanoscale) positioning systems. Even though modern model-based control theoretic designs for robust broadband high-resolution positioning have enabled orders of magnitude improvement in performance over existing model independent designs, their scope is severely limited by the inefficacies of digital implementation of the control designs. High-order control laws that result from model-based designs typically have to be approximated with reduced-order systems to facilitate digital implementation.