Low temperature crystallization of transparent, highly ordered nanoporous SnO₂ thin films: application to room-temperature hydrogen sensing.

High surface area highly ordered nanoporous thin films are the current gold standard for gas sensor use, however the nanostructure of such films is prone to collapse at annealing temperatures as low as 250 °C resulting in formation of a dense layer of limited utility. We report on a templating method used to deposit highly ordered nanoporous platinum (Pt)-doped tin dioxide (SnO(2)) thin films that are crystallized by a 100 °C water vapor hydrothermal treatment, with the low temperature process being compatible with a large variety of substrates including plastic. The resulting highly ordered nanoporous, transparent Pt-SnO(2) thin films are mechanically stable and can be annealed, as desired, at temperatures up to 800 °C for removal of the templating materials and tailoring of gas sensitivities without damage to the nanoporous structure.