Polysilicon micro-heaters for resonance tuning in CMOS photonics.

A new, to the best of our knowledge, device platform for tuning the resonance wavelength of integrated photonic resonators based on polysilicon-based micro-heaters for complementary metal-oxide semiconductor (CMOS)-foundry-based active Si photonics is demonstrated. The miniaturized micro-heater can be placed directly on the active Si layer, with a pedestal providing the optical and electrical isolation needed for the implementation of ultrafast active photonic devices such as modulators. The demonstrated devices do not require any additional modifications to the standard CMOS foundry processes.