Compact two-dimensional coarse-positioner for scanning probe microscopes.

We report on the design and fabrication of a compact two-dimensional xy-positioner for scanning probe microscopes. This positioner uses three piezoelectric bimorphs in flexing or length-change mode by appropriate selection of electrodes and voltage polarities. One end of these bimorphs is fixed to a rectangular metal frame while on each of the free ends two sapphire disks are fixed which can slide against the polished plates of a platform movable in the xy-plane.