A high speed X-Y nanopositioner with integrated optical motion sensing.

High speed in-plane (X-Y) nanopositioners are of central importance in scanning probe microscopy for performing fast imaging and manipulation. Reducing the size of the nanopositioning stage improves the response speed of the positioner but also introduces challenges in integration of conventional motion sensors. This paper presents the design and development of a novel high speed flexure-guided, piezo-electrically actuated nanopositioner with integrated optical beam deflection-based motion sensing.

Note: Design and development of an integrated three-dimensional scanner for atomic force microscopy.

A compact scanning head for the Atomic Force Microscope (AFM) greatly enhances the portability of AFM and facilitates easy integration with other tools. This paper reports the design and development of a three-dimensional (3D) scanner integrated into an AFM micro-probe. The scanner is realized by means of a novel design for the AFM probe along with a magnetic actuation system.

A two-axis in-plane motion measurement system based on optical beam deflection.

Measurement of in-plane motion with high resolution and large bandwidth enables model-identification and real-time control of motion-stages. This paper presents an optical beam deflection based system for measurement of in-plane motion of both macro- and micro-scale motion stages. A curved reflector is integrated with the motion stage to achieve sensitivity to in-plane translational motion along two axes.