The results of a study of the structural and reflective characteristics of short-period multilayer X-ray mirrors based on Mo/BC at wavelengths 1.54 Å, 9.89 Å and 17.
View Article and Find Full Text PDFThe reflective and structural parameters of Be/Si/Al multilayer mirrors have been studied. The extent of stability of their X-ray optical characteristics has been demonstrated during storage in air for 4 years and during vacuum annealing at temperatures up to 100°C. A high reflectance of 62.
View Article and Find Full Text PDFThe results of the investigation of the reflective characteristics of multilayer mirrors based on Ru/Y are presented. Reflection coefficients at the level of 38.5% at an operating wavelength of 9.
View Article and Find Full Text PDFThe results of investigations of Ru/Sr multilayer coatings optimized for the spectral range of 9-12 nm are presented in this Letter. Such mirrors are promising optical elements for solar astronomy and for the development of beyond extreme ultraviolet (BEUV) lithography. A near-normal incidence reflectivity of up to 62.
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