Design and experiment of generalized triple-cross-spring flexure pivots applied to the ultra-precision instruments.

Owing to the excellent performance, the generalized cross-spring flexure pivots (GCSFP), formed by two symmetric crossing leaves at an arbitrary position along the radial direction, had been widely used in precision instruments. However, the accuracy of GCSFPs is lower than the required one for some ultra-precision instruments. Especially for the large angles, the axis drift of GCSFPs cannot be ignored.