Mechanism of Nano-Structuring Manipulation of the Crystallization Temperature of Superlattice-like [GeSb/Ge] Phase-Change Films.

Superlattice-like (SLL) phase-change film is considered to be a promising phase-change material because it provides more controllabilities for the optimization of multiple performances of phase-change films. However, the mechanism by which SLL structure affects the properties of phase-change films is not well-understood. Here, four SLL phase-change films [GeSb(15 nm)/Ge (x nm)] with different x are fabricated.