Microsphere-Based Microsensor for Miniature Motors' Vibration Measurement.

We present a microsphere-based microsensor that can measure the vibrations of the miniature motor shaft (MMS) in a small space. The microsensor is composed of a stretched fiber and a microsphere with a diameter of 5 μm. When a light source is incident on the microsphere surface, the microsphere induces the phenomenon of photonic nanojet (PNJ), which causes light to pass through the front.