MEMS fast steering mirror with a large optical aperture and high surface quality for free-space optical communication.

This work presents a MEMS fast steering mirror fabricated by an 8-inch AlScN platform, with a large optical aperture of up to 10 mm and high surface quality (RMS < 20 nm, PV < 120 nm), intended for free-space optical communication. The device comprises a high reflective mirror plate, a pillar and four cantilever beams with AlScN thin films. This device is prepared by a wafer-level eutectic bonding process.

Mid-infrared silicon photonic phase shifter based on microelectromechanical system.

Mid-infrared (MIR) photonic integrated circuits have generated considerable interest, owing to their potential applications, such as thermal imaging and biochemical sensing. A challenging area in the field is the development of reconfigurable approaches for the enhancement of on-chip functions, where a phase shifter plays an important role. Here, we demonstrate a MIR microelectromechanical system (MEMS) phase shifter by utilizing an asymmetric slot waveguide with subwavelength grating (SWG) claddings.

Silicon Photonic Phase Shifters and Their Applications: A Review.

With the development of silicon photonics, dense photonic integrated circuits play a significant role in applications such as light detection and ranging systems, photonic computing accelerators, miniaturized spectrometers, and so on. Recently, extensive research work has been carried out on the phase shifter, which acts as the fundamental building block in the photonic integrated circuit. In this review, we overview different types of silicon photonic phase shifters, including micro-electro-mechanical systems (MEMS), thermo-optics, and free-carrier depletion types, highlighting the MEMS-based ones.

Suspended Silicon Waveguide with Sub-Wavelength Grating Cladding for Optical MEMS in Mid-Infrared.

Mid-infrared (MIR) photonics are generating considerable interest because of the potential applications in spectroscopic sensing, thermal imaging, and remote sensing. Silicon photonics is believed to be a promising solution to realize MIR photonic integrated circuits (PICs). The past decade has seen a huge growth in MIR PIC building blocks.

Bi-layered composite gratings with high diffraction efficiency enabled by near-field coupling.

In this paper, we present a design method for bi-layered composite gratings to achieve high diffraction efficiency. These composite gratings feature strong near-field coupling between their constituent dielectric subwavelength gratings, thus enabling high-efficiency first-order diffraction in the far-field. An intuitive explanation based on a wavevector matching condition for such high diffraction efficiency composite gratings is provided.

Multifunctional mid-infrared photonic switch using a MEMS-based tunable waveguide coupler.

We demonstrate a multifunctional photonic switch on silicon-on-insulator platform operating at the mid-infrared wavelength range (3.85-4.05 µm) using suspended waveguides with sub-wavelength cladding and a micro-electro-mechanical systems (MEMS) tunable waveguide coupler.

Ultra-small photonic crystal (PhC)-based test tool for gas permeability of polymers.

We present an ultra-small photonic crystal-based test tool for gas permeability of polymers. It features a fully-etched photonic crystal (PhC) structure occupying an area of 20 µm × 800 µm on silicon-on-insulator wafer. The light-matter interaction in the PhC cavity with deformed Polydimethylsiloxane (PDMS) under pressure difference was investigated with finite element method and finite-difference time-domain method numerically.

Applications of Photonic Crystal Nanobeam Cavities for Sensing.

In recent years, there has been growing interest in optical sensors based on microcavities due to their advantages of size reduction and enhanced sensing capability. In this paper, we aim to give a comprehensive review of the field of photonic crystal nanobeam cavity-based sensors. The sensing principles and development of applications, such as refractive index sensing, nanoparticle sensing, optomechanical sensing, and temperature sensing, are summarized and highlighted.

Design of an on-chip Fourier transform spectrometer using waveguide directional couplers and NEMS.

A novel concept of on-chip Fourier transform spectrometer is proposed. It consists of semiconductor waveguide directional couplers and NEMS actuators. The optical path difference can be tuned by controlling the NEMS actuators to couple or decouple the directional couplers.