Study on the Hydrophobic Modification of MTES/NH Vapor Surface Treatment for SiO Broadband Anti-Reflection Coating.

In this article, ammonia and methyltriethoxysilane (MTES) were chosen as vapor phase modifiers for the base-catalyzed SiO film. The surface of the film became more dense because of the hydroxyl condensation under the catalyst of ammonia, while the introduction of methyl groups by MTES of vapor treatment hindered the condensation to avoid over-change in film thickness. The hydrophobic of film was improved while the surface roughness of the film increased after treatment.