Polymer Ring-Flexure-Membrane Suspended Gate FET Gas Sensor: Design, Modelling and Simulation.

This work reports the design, modelling, and simulation of a novel polymer MEMS gas sensor platform called a ring-flexure-membrane (RFM) suspended gate field effect transistor (SGFET). The sensor consists of a suspended polymer (SU-8) MEMS based RFM structure holding the gate of the SGFET with the gas sensing layer on top of the outer ring. During gas adsorption, the polymer ring-flexure-membrane architecture ensures a constant gate capacitance change throughout the gate area of the SGFET.