Piezoresistive Sensor Based on Micrographite-Glass Thick Films.

A new Pb-free glass containing several oxides (BiO, BO, SiO, AlO and ZnO) with sintering temperature reduced down to 600 °C has been developed for applications in a piezoresistive pressure sensor. Using this low sintering temperature glass, it was possible to fabricate micrographite-based pastes and piezoresistive films without losses of graphitic material during the sintering. Good adherence of the films onto alumina substrates was observed and attributed in part to the reactions of ZnO and BiO with alumina substrates.