Quantitative native speciation of ppb-level metals in semiconductor-manufacturing-used strong acids and a base.

The presence of metal species in solvents significantly impacts production yields in the semiconductor industry, particularly as the dimensions of integrated circuits continue to decrease. Therefore, it is imperative to control metal concentrations in solvents to levels as low as a few parts per billion (ppb) throughout fabrication processes. Effective purification methods are essential for removing various levels of contamination, and understanding the speciation of metals is crucial for achieving efficient purification.