Structure Effect on the Response of ZnGaO Gas Sensor for Nitric Oxide Applications.

We fabricated a gas sensor with a wide-bandgap ZnGaO (ZGO) epilayer grown on a sapphire substrate by metalorganic chemical vapor deposition. The ZGO presented (111), (222) and (333) phases demonstrated by an X-ray diffraction system. The related material characteristics were also measured by scanning electron microscopy, transmission electron microscopy and X-ray photoelectron spectroscopy.