Structural, Optical, and Electrical Properties of Hafnium-Aluminum-Zinc-Oxide Films Grown by Atomic Layer Deposition for TCO Applications.

ZnO is a widely studied material that exhibits versatile doping possibilities. Most research presents singly doped ZnO, leaving the potential of codoping unexplored. Within this study, hafnium-aluminum codoped zinc oxide (HAZO) thin films were grown on a glass substrate using the atomic layer deposition technique at 200 °C.