Atom probe tomography (APT), a 3D microscopy technique, has great potential to reveal atomic scale compositional variations, such as those associated with irradiation damage. However, obtaining accurate compositional quantification by APT for high bandgap materials is a longstanding challenge, given the sensitivity to field evaporation parameters and inconsistent behaviors across different oxides. This study investigates the influence of APT laser energy and specimen base temperature on compositional accuracy in single crystal thoria (ThO).
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