An Angstrom-sensitive, differential MEMS capacitor for monitoring the milliliter dynamics of fluids.

A device, with MEMS sensors at its core, has been fabricated and tested for measuring low fluid pressure and slow flow rates. The motivation was to measure clinically relevant ranges of slow-moving fluids in living systems, such as the cerebrospinal fluid in the brain. For potential clinical utility, the device can be read transcutaneously by inductive coupling to MEMS capacitive sensors in circuits with resonance frequencies in the MHz range.

Evidence of an application of a variable MEMS capacitive sensor for detecting shunt occlusions.

A sensor was tested subdural and in vitro, simulating a supine infant with a ventricular-peritoneal shunt and controlled occlusions. The variable MEMS capacitive device is able to detect and forecast blockages, similar to early detection procedures in cancer patients. For example, with gradual occlusion development over a year, the method forecasts a danger over one month ahead of blockage.