Spherically shaped micro-structured antireflective surfaces.

An antireflecting micro-structured interface, working in the resonance domain, and made from a bi-periodic array of semi-spherical hollowing-out in a silicon substrate is presented. Its parameters such as sphere radius and position of sphere centers from the surface are optimized numerically. A simple and robust process is described allowing such kind of antireflective surfaces to be fabricated for the infrared range.

Enhanced antireflecting properties of micro-structured top-flat pyramids.

This paper aims at modeling bi-periodic micro-structured silicon surfaces exhibiting broadband antireflection properties in the infrared range using Rigorous Coupled-Wave Analysis (RCWA). These structures of pyramidal shape, which typical dimensions are smaller than the wavelength, are not in the Effective Medium Theory (EMT) validity domain. The influence of various opto-geometrical parameters such as period, depth, shape of the pattern is examined.