Profile reconstruction of periodic interface.

The reconstruction problem for periodic (arbitrary profiled within a period) boundary between two homogeneous media is considered. Our approach to the solution of the inverse problem is based on the Tikhonov regularization technique, which requires successive selection of the boundaries on the basis of multiple solutions of the direct problem of wave diffraction by the candidate boundaries. The analytical numerical C method has been chosen as a simple but rather efficient tool for the direct problem solving.

Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings.

This paper focuses on scatterometry problems arising in lithography production of periodic gratings. Namely, the paper introduces a theoretical and numerical-modeling-oriented approach to scatterometry problems and discusses its capabilities. The approach allows for reliable detection of deviations in gratings' critical dimensions (CDs) during the manufacturing process.