In-situ Raman analysis of hydrogenation in well-defined ultrathin molybdenum diselenide deposits synthesized through vapor phase deposition.

We report on the synthesis, characterization and in-situ Raman spectroscopy analysis of hydrogenation in ultrathin crystalline MoSe deposits. We use a controllable vapor phase synthesis method using MoSe powder as the only precursor, to fabricate nano- to micro-size few layer thick MoSe deposits with tunable number densities on SiO/Si substrates. We employ this controllable synthesis method to correlate characteristic Raman spectroscopy response of MoSe at ca.