We present a normal incidence terahertz reflectivity technique to determine the optical thickness and birefringence of yttria-stabilized zirconia (YSZ) thermal barrier coatings (TBCs). Initial verification of the method was achieved by measurement of a set of fused silica calibration samples with known thicknesses and showed excellent agreement (<1% of refractive index) with the literature. The THz-measured optical thickness and its variation through the depth profile of the YSZ coating are shown to be in good agreement (<4%) with scanning electron microscope cross-sectional thickness measurements.
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