Two-photon polymerisation 3D printed freeform micro-optics for optical coherence tomography fibre probes.

Miniaturised optical coherence tomography (OCT) fibre-optic probes have enabled high-resolution cross-sectional imaging deep within the body. However, existing OCT fibre-optic probe fabrication methods cannot generate miniaturised freeform optics, which limits our ability to fabricate probes with both complex optical function and dimensions comparable to the optical fibre diameter. Recently, major advances in two-photon direct laser writing have enabled 3D printing of arbitrary three-dimensional micro/nanostructures with a surface roughness acceptable for optical applications.

Oxide impurities in silicon oxide intermetal dielectrics and their potential to elevate via-resistances.

Silicon oxide used as an intermetal dielectric (IMD) incorporates oxide impurities during both its formation and subsequent processing to create vias in the IMD. Without a sufficient degassing of the IMD, oxide impurities released from the IMD during the physical vapor deposition (PVD) of the glue layer of the vias had led to an oxidation of the glue layer and eventual increase of the via resistances, which correlated with the O-to-Si atomic ratio of the IMD being ~10% excessive as verified by transmission electron microscopy (TEM) analysis. A vacuum bake of the IMD was subsequently implemented to enhance outgassing of the oxide impurities in the IMD before the glue layer deposition.

Sample preparation for precise and quantitative electron holographic analysis of semiconductor devices.

Wedge polishing was used to prepare one-dimensional Si n-p junction and Si p-channel metal-oxide-silicon field effect transistor (pMOSFET) samples for precise and quantitative electrostatic potential analysis using off-axis electron holography. To avoid artifacts associated with ion milling, cloth polishing with 0.02-microm colloidal silica suspension was used for final thinning.

Multimillimetre-large superlattices of air-stable iron-cobalt nanoparticles.

Self-organization of nanoparticles into two- and three-dimensional superlattices on a large scale is required for their implementation into nano- or microelectronic devices. This is achieved, generally after a size-selection process, through spontaneous self-organization on a surface, layer-by-layer deposition or the three-layer technique of oversaturation, but these techniques consider superlattices of limited size. An alternative method developed in our group involves the direct formation in solution of crystalline superlattices, for example of tin nanospheres, iron nanocubes or cobalt nanorods, but these are also of limited size.

Superlattices of iron nanocubes synthesized from Fe[N(SiMe3)2]2.

The reaction of the metal-organic precursor Fe[N(SiMe3)2]2 with H2 in the presence of a long-chain acid and a long-chain amine in various proportions produces monodisperse zerovalent iron nanoparticles. These Fe particles display magnetic properties that match those of bulk iron as evidenced by magnetic and Mössbauer measurements. The nanoparticles adopt a cubic shape with edges of 7 nanometers and are incorporated into extended crystalline superlattices containing nanocubes in close proximity and with their crystallographic axes aligned.