An FEM Study on Minimizing Electrostatic Cross-Talk in a Comb Drive Micro Mirror Array.

We are developing a phase-modulating micro mirror-array spatial light modulator to be used for real holography within the EU-funded project REALHOLO, featuring millions of pixels that can be individually positioned in a piston mode at a large frame rate. We found earlier that an electrostatic comb-drive array offers the best performance for the actuators: sufficient yoke forces for fast switching even at low voltages compatible with the CMOS addressing backplane. In our first design, the well-known electrostatic cross-talk issue had already been much smaller than would have been possible for parallel-plate actuators, but it was still larger than the precision requirements for high-image-quality holography.