Wide dynamic range homodyne interferometry method and its application for piezoactuator displacement measurements.

Multiactuated piezoelectric flextensional actuators (MAPFAs) is a fast-growing technology in development, with a wide range of applications in precision mechanics and nanotechnology. In turn, optical interferometry is an adequate technique to measure nano/micro-displacements and to characterize these MAPFAs. In this work, an efficient method for homodyne phase detection, based on a well-known Bessel functions recurrence relation, is developed, providing practical applications with a high dynamic range.