Characterization of Elastic Modulus Across the (AlSc)N System Using DFT and Substrate-Effect-Corrected Nanoindentation.

Knowledge of accurate values of elastic modulus of (AlSc)N is required for design of piezoelectric resonators and related devices. Thin films of (AlSc)N across the entire composition space are deposited and characterized. Accuracy of modulus measurements is improved and quantified by removing the influence of substrate effects and by direct comparison of experimental results with density functional theory calculations.