Electron-beam and ion-beam-induced deposited tungsten contacts for carbon nanofiber interconnects.

Ion-beam-induced deposition (IBID) and electron-beam-induced deposition (EBID) with tungsten (W) are evaluated for engineering electrical contacts with carbon nanofibers (CNFs). While a different tungsten-containing precursor gas is utilized for each technique, the resulting tungsten deposits result in significant contact resistance reduction. The performance of CNF devices with W contacts is examined and conduction across these contacts is analyzed.

Carbon nanofiber interconnect RF characteristics improvement with deposited tungsten contacts.

Carbon nanotubes (CNTs) and carbon nanofibers (CNFs) are potential materials for high-performance electronic devices and circuits due to their light weight and excellent electrical properties such as high current capacity and tolerance to electromigration. In addition, at high frequencies, these materials exhibit transport behavior which holds special promise for applications as on-chip interconnects. Contact resistance at CNF-metal interface is a major factor in limiting the electrical performance of CNF interconnects at all frequencies.

The effect of catalysts and underlayer metals on the properties of PECVD-grown carbon nanostructures.

The growth behaviors and contact resistances of vertically aligned carbon nanotubes (CNTs) and carbon nanofibers (CNFs) grown on different underlayer metals are investigated. The average diameter, diameter distribution, density, growth rate and contact resistance exhibit strong correlation with the choice of catalyst/underlayer combination. These observations are analyzed in terms of interactions between the catalyst and the underlayer metal.

Functionalization of carbon nanotubes via nitrogen glow discharge.

We have exposed single-wall carbon nanotubes (SWCNTs) to microwave-generated N2 plasma with the aim to functionalize the nanotubes. The results strongly depend on the distance between the discharge source and the sample, since nitrogen atoms generated can be lost due to recombination. No functionalization was observed when this distance was 7.