Numerical profile correction of microwave cavity resonance spectroscopy measurements of the electron density in low-pressure discharges.

Low-temperature plasmas are widely studied in laboratory environments and form the backbone of many industrial processes. Highly energized electrons enable processes such as ionization, dissociation, and plasma chemical reactions, while the heavy species, such as neutral gas atoms and molecules, remain near room temperature. Hence, understanding the electron dynamics is crucial to the control and optimization of plasmas and their applications.