High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface.

Lateral optical distortion is present in most optical imaging systems. In coherence scanning interferometry, distortion may cause field-dependent systematic errors in the measurement of surface topography. These errors become critical when high-precision surfaces, e.

Advanced image analysis verifies geometry performance of micro-milling systems.

Accurate dimensional measurement of micro-milled items is a challenge and machine specifications do not include operational parameters in the workshop. Therefore, a verification test that shows the machine's overall geometrical performance over its working area would help machine users in the assessment and adjustment of their equipment. In this study, we present an optical technique capable of finding micro-milled features at submicron uncertainty over working areas >10  cm.

Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels.

Optical coherence tomography (OCT) has proven to be a useful tool for investigating internal structures in ceramic tapes, and the technique is expected to be important for roll-to-roll manufacturing. However, because of high scattering in ceramic materials, noise and speckles deteriorate the image quality, which makes automated quantitative measurements of internal interfaces difficult. To overcome this difficulty we present in this paper an innovative image analysis approach based on volumetric OCT data.

Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data.

Optical coherence tomography (OCT) is useful for materials defect analysis and inspection with the additional possibility of quantitative dimensional metrology. Here, we present an automated image-processing algorithm for OCT analysis of roll-to-roll multilayers in 3D manufacturing of advanced ceramics. It has the advantage of avoiding filtering and preset modeling, and will, thus, introduce a simplification.

Optical coherence tomography for quality assessment of embedded microchannels in alumina ceramic.

Large-scale and cost-effective manufacturing of ceramic micro devices based on tape stacking requires the development of inspection systems to perform high-resolution in-process quality control of embedded manufactured cavities, metal structures and defects. With an optical coherence tomography (OCT) system operating at 1.3 μm and a dedicated automated line segmentation algorithm, layer thicknesses can be measured and laser-machined channels can be verified in alumina ceramics embedded at around 100 μm depth.