Negative Capacitance and Dielectric Constant of Nanocomposite SiAlON(Si) Films with Semiconductor Nanoparticles.

The electrical properties of nanocomposite SiAlON(Si) films containing Si nanoclusters embedded into amorphous SiAlON matrix have been studied by measurements of DC current-voltage and AC capacitance-voltage characteristics. Analysis of the results allowed us to conclude the existence of a negative dielectric constant. The temperature dependence of the negative dielectric constant has been obtained and analyzed.