Fabrication and use of a nanoscale Hall probe for measurements of the magnetic field induced by MFM tips.

Extraordinary Hall effect probes with 160 nm × 160 nm working area were fabricated using photo- and electron-beam lithographic procedures with the aim of direct measurements of MFM cantilever tip magnetic properties. The magnetic field sensitivity of the probes was 35 Ω T(-1). Magnetic induction of the MFM cantilever tips coated by Co and SmCo films was measured with the probes.