Sputtered LiCoO Cathode Materials for All-solid-state Thin-film Lithium Microbatteries.

This review article presents the literature survey on radio frequency (RF)-magnetron sputtered LiCoO thin films used as cathode materials in all-solid-state rechargeable lithium microbatteries. As the process parameters lead to a variety of texture and preferential orientation, the influence of the sputtering conditions on the deposition of LiCoO thin films are considered. The electrochemical performance is examined as a function of composition of the sputter Ar/O gas mixture, gas flow rate, pressure, nature of substrate, substrate temperature, deposition rate, and annealing temperature.