A New Insight into High-Aspect-Ratio Channel Drilling in Translucent Dielectrics with a KrF Laser for Waveguide Applications.

A new insight into capillary channel formation with a high aspect ratio in the translucent matter by nanosecond UV laser pulses is discussed based on our experiments on KrF laser multi-pulse drilling of polymethyl methacrylate and K8 silica glass. The proposed mechanism includes self-consistent laser beam filamentation along a small UV light penetration depth caused by a local refraction index increase due to material densification by both UV and ablation pressure, followed by filamentation-assisted ablation. A similar mechanism was shown to be realized in highly transparent media, i.