Influence of spatial and temporal coherences on atomic resolution high angle annular dark field imaging.

Aberration-corrected (scanning) transmission electron microscopy ((S)TEM) has become a widely used technique when information on the chemical composition is sought on an atomic scale. To extract the desired information, complementary simulations of the scattering process are inevitable. Often the partial spatial and temporal coherences are neglected in the simulations, although they can have a huge influence on the high resolution images.

Determination of the chemical composition of GaNAs using STEM HAADF imaging and STEM strain state analysis.

The nitrogen concentration of GaN(0.01≤x≤0.05)As(1-x) quantum wells was determined from high resolution scanning transmission electron microscopy (HRSTEM) images taken with a high-angle annular dark field (HAADF) detector.