Stress, reflectance, and stability of Ru/Be multilayer coatings with Mo interlayers near the 11 nm wavelength.

The stress, reflectance, and temporal stability of Ru/Be multilayer mirrors, both with and without Mo interlayers, were studied. A Ru/Be MLM was found to have zero stress at a Ru layer thickness-to-period ratio of γ ∼ 0.4.

Reflecting properties of narrowband Si/Al/Sc multilayer mirrors at 58.4 nm.

This study considers the reflective characteristics of three-component Si/Al/Sc multilayer mirrors with a protective cap layer as candidates for telescopes for observation of the solar corona in the He I (=58.4) spectral line. At 58.

Stable high-reflection Be/Mg multilayer mirrors for solar astronomy at 30.4 nm.

The He-II (λ=30.4  nm) emission line is one of the spectral channels chosen to study solar corona. This Letter reports on investigations of novel beryllium (Be)/magnesium multilayer coatings which, when incorporated beneath a protective bilayer of aluminium and Be, ensure particularly high-reflection coefficients of up to 56%, a spectral width of Δλ=1.

High-reflection Mo/Be/Si multilayers for EUV lithography.

The effect of Be layers on the reflection coefficients of Mo/Be/Si multilayer mirrors in the extreme ultraviolet (EUV) region is reported. Samples were studied using laboratory and synchrotron based reflectometry, and high-resolution transmission electron microscopy. The samples under study have reflection coefficients above 71% at 13.