Publications by authors named "Nicolas Ledermann"
Piezoelectric micromachined ultrasonic transducers based on PZT thin films.
IEEE Trans Ultrason Ferroelectr Freq Control
December 2005
This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-microm-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films.
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