Dual-track spectrometer design for 1D gas-phase Raman spectroscopy.

In this study, a new design for a 1D gas-phase Raman spectrometer is presented, utilizing two dedicated tracks to image different properties of the measured signal onto a single charge-coupled device (CCD) chip. Two possible configurations are shown: a polarization-separation configuration, which separates the detected Raman signal into s- and p-polarized shares; and a dual-resolution configuration, which captures all process-relevant species in a range of approximately 515-4650 cm on one track and the highly resolved nitrogen spectrum on the other. This new spectrometer design offers several advantages when compared to traditional polarization-separation/dual-resolution systems, which often use switchable filters or two different spectrometers in tandem to achieve comparable measurements.