Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators.

A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-coated Z-cut alpha quartz wafer, followed by wet etching.