Characterization of high intensity progressive ultrasound beams in air at 300 kHz.

The majority of reported measurements on high intensity ultrasound beams in air are below 40 kHz and performed on standing waves inside of a guide. Here, experimental characterization of high intensity progressive and divergent sound beams in air at 300 kHz are presented. Measurements in this frequency range are challenging.

Towards acoustic particle velocity sensors in air using entrained balloons: Measurements and modeling.

In this article, the feasibility of using balloons for the measurement of acoustic particle velocity in air is investigated by exploring the behavior of an elastic balloon in air as it vibrates in response to an incident acoustic wave. This is motivated by the frequent use of neutrally buoyant spheres as underwater inertial particle velocity sensors. The results of experiments performed in an anechoic chamber are presented, in which a pair of laser Doppler vibrometers simultaneously captured the velocities of the front and back surfaces of a Mylar balloon in an acoustic field.

On the theoretical maximum achievable signal-to-noise ratio (SNR) of piezoelectric microphones.

A theoretical maximum achievable signal to noise ratio (SNR) for piezoelectric microphones is identified as a function of only microphone volume irrespective of architecture and construction details. For a given piezoelectric material, microphone SNR can be reduced to an expression containing only a dimensionless coupling coefficient and microphone volume. For a given material, the coupling coefficient has a theoretical upper bound defined by the most favorable deformation geometry.

Thévenin acoustics.

Thévenin's theorem is commonly used in the analysis of acoustic transducers to provide a simplified representation of a transducer or its environment. The method may be extended to the analyses of other acoustic systems, without limitation to systems that have been reduced to analogous circuit models, and is particularly convenient in the analysis of acoustic scattering when the scattering object is mobile. In this paper, the method is illustrated through an alternative derivation of the well-known "mass law" for transmission through a partition, and is also applied to the case of acoustic scattering from a rigid, mobile cylinder of arbitrary size in an ideal plane progressive wave.

A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones.

Pressure-differential microphones inspired by the hearing mechanism of a special parasitoid fly have been described previously. The designs employ a beam structure that rotates about two pivots over an enclosed back volume. The back volume is only partially enclosed due to open slits around the perimeter of the beam.

A Theoretical and Experimental Comparison of 3-3 and 3-1 Mode Piezoelectric Microelectromechanical Systems (MEMS).

Two piezoelectric transducer modes applied in microelectromechanical systems are (i) the 3-1 mode with parallel electrodes perpendicular to a vertical polarization vector, and (ii) the 3-3 mode which uses interdigitated (IDT) electrodes to realize an in-plane polarization vector. This study compares the two configurations by deriving a Norton equivalent representation of each approach - including expressions for output charge and device capacitance. The model is verified using a microfabricated device comprised of multiple epitaxial silicon beams with sol-gel deposited lead zirconate titanate at the surface.

A rotational capacitive micromachined ultrasonic transducer (RCMUT) with an internally-sealed pivot.

Most capacitive micromachined ultrasonic transducers (CMUTs) are comprised of individual gap-closing parallel plates. We present an unconventional CMUT in which a vacuum-sealed cavity beneath a diaphragm layer comprises a mechanical structure that pivots and has a first rocking or rotational mode of vibration. The general ability to couple individual CMUT pistons under vacuum with mechanical structures to alter vibration mode frequencies and mode shapes is thus demonstrated.

A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200 kHz bandwidth.

A surface micromachined microphone is presented with 230 kHz bandwidth. The structure uses a 2.25 μm thick, 315 μm radius polysilicon diaphragm suspended above an 11 μm gap to form a variable parallel-plate capacitance.

Towards a sub 15-dBA optical micromachined microphone.

Micromachined microphones with grating-based optical-interferometric readout have been demonstrated previously. These microphones are similar in construction to bottom-inlet capacitive microelectromechanical-system (MEMS) microphones, with the exception that optoelectronic emitters and detectors are placed inside the microphone's front or back cavity. A potential advantage of optical microphones in designing for low noise level is the use of highly-perforated microphone backplates to enable low-damping and low thermal-mechanical noise levels.

Micromachined piezoelectric microphones with in-plane directivity.

Micromachined piezoelectric microphones with in-plane directivity are introduced. A beam rotates about center torsional pivots and is attached to piezoelectrically active end-springs. Rotation of the beam in response to sound pressure gradients produces spring deflections, which, in turn, produce an open-circuit voltage at the piezoelectric films.

Thermoacoustic sound generation from monolayer graphene for transparent and flexible sound sources.

Transparent and flexible loudspeakers are realized with large-area monolayer graphene. The acoustic performances are characterized according to the supporting substrate effect and geometrical configurations. The substrate effect on the thermoacoustic sound generation from graphene is studied by controlling the surface porosity of various substrates.

Simulation of Thin-Film Damping and Thermal Mechanical Noise Spectra for Advanced Micromachined Microphone Structures.

In many micromachined sensors the thin (2-10 μm thick) air film between a compliant diaphragm and backplate electrode plays a dominant role in shaping both the dynamic and thermal noise characteristics of the device. Silicon microphone structures used in grating-based optical-interference microphones have recently been introduced that employ backplates with minimal area to achieve low damping and low thermal noise levels. Finite-element based modeling procedures based on 2-D discretization of the governing Reynolds equation are ideally suited for studying thin-film dynamics in such structures which utilize relatively complex backplate geometries.

Micromachined Accelerometers With Optical Interferometric Read-Out and Integrated Electrostatic Actuation.

A micromachined accelerometer device structure with diffraction-based optical detection and integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof mass electrode that moves vertically with respect to a rigid diffraction grating backplate electrode to provide interferometric detection resolution of the proof-mass displacement when illuminated with coherent light. The sensor architecture includes a monolithically integrated electrostatic actuation port that enables the application of precisely controlled broadband forces to the proof mass while the displacement is simultaneously and independently measured optically.

Impact of relative intensity noise of vertical-cavity surface-emitting lasers on optics-based micromachined audio and seismic sensors.

The relative intensity noise of vertical-cavity surface-emitting lasers (VCSELs) in the 100 mHz to 50 kHz frequency range is experimentally investigated using two representative single-mode VCSELs. Measurements in this frequency range are relevant to recently developed optical-based micromachined acoustic and accelerometer sensing structures that utilize VCSELs as the light source to form nearly monolithic 1 mm3 packages. Although this frequency regime is far lower than the gigahertz range relevant to optical communication applications for which VCSELs are primarily designed, the intensity noise is found to be low and well within the range of cancellation using basic reference detection principles.

Micromachined optical microphone structures with low thermal-mechanical noise levels.

Micromachined microphones with diffraction-based optical displacement detection have been introduced previously [Hall et al., J. Acoust.

A grating-assisted resonant-cavity-enhanced optical displacement detection method for micromachined sensors.

We present an integrated optical displacement sensing method for microscale sensors which is based on an asymmetric Fabry-Perot etalon structure with an embedded phase-sensitive diffraction grating. Analytical modeling of the structure shows that the etalon significantly improves the detection sensitivity as compared to a regular optical interferometer and the embedded diffraction grating enables integration of optoelectronics in a small volume. The efficacy of the method is experimentally validated on a surface micromachined diffraction-based opto-acoustic sensor fabricated on a quartz wafer.

Capacitive micromachined ultrasonic transducers with diffraction-based integrated optical displacement detection.

Capacitive detection limits the performance of capacitive micromachined ultrasonic transducers (CMUTs) by providing poor sensitivity below megahertz frequencies and limiting acoustic power output by imposing constraints on the membrane-substrate gap height. In this paper, an integrated optical interferometric detection method for CMUTs, which provides high displacement sensitivity independent of operation frequency and device capacitance, is reported. The method also enables optoelectronics integration in a small volume and provides optoelectronic isolation between transmit and receive electronics.