Profile reconstruction of periodic interface.

The reconstruction problem for periodic (arbitrary profiled within a period) boundary between two homogeneous media is considered. Our approach to the solution of the inverse problem is based on the Tikhonov regularization technique, which requires successive selection of the boundaries on the basis of multiple solutions of the direct problem of wave diffraction by the candidate boundaries. The analytical numerical C method has been chosen as a simple but rather efficient tool for the direct problem solving.

Time-and-frequency domains approach to data processing in multiwavelength optical scatterometry of dielectric gratings.

This paper focuses on scatterometry problems arising in lithography production of periodic gratings. Namely, the paper introduces a theoretical and numerical-modeling-oriented approach to scatterometry problems and discusses its capabilities. The approach allows for reliable detection of deviations in gratings' critical dimensions (CDs) during the manufacturing process.

Modeling and analysis of transients in periodic gratings. II. Resonant wave scattering.

In this paper we represent a number of new physical results obtained using time domain methods and based on equivalent replacement of initially open electrodynamic problems with closed ones. These results prove the high efficiency and reliability of the approach, being grounded in our companion paper in this issue.

Modeling and analysis of transients in periodic gratings. I. Fully absorbing boundaries for 2-D open problems.

Frequency domain methods allow us to simulate and study efficiently only some of the periodic structures that are widespread in optics and spectroscopy. Time domain approaches could be more effective, but their deployment is held back by a number of unsolved problems associated mainly with a proper truncation of the computation space in the so-called open problems. This paper is devoted to analysis of these problems in the 2-D case (infinite one-dimensionally periodic semitransparent and reflecting gratings in the field of pulsed E- and H-polarized waves).