Spatially Ordered Matrix of Nanostructured Tin-Tungsten Oxides Nanocomposites Formed by Ionic Layer Deposition for Gas Sensing.

The process of layer-by-layer ionic deposition of tin-tungsten oxide films on smooth silicon substrates and nanoporous anodic alumina matrices has been studied. To achieve the film deposition, solutions containing cationic SnF or SnCl and anionic NaWO or (NH)O·WO precursors have been used. The effect of the solution compositions on the films deposition rates, morphology, composition, and properties was investigated.