Optical properties of black silicon structures ALD-coated with AlO.

Atomic layer deposited (ALD) AlOcoatings were applied on black silicon (b-Si) structures. The coated nanostructures were investigated regarding their reflective and transmissive behaviour. For a systematic study of the influence of the AlOcoating, ALD coatings with a varying layer thickness were deposited on three b-Si structures with different morphologies.