Publications by authors named "Naohiko Kobata"
Materials (Basel)
November 2024
Article Synopsis
- Blue laser annealing enhances the performance of thin-film transistors (TFTs) but faces challenges with low productivity and high costs due to the limitations of current lasers.
- A new blue laser light source was developed using the wavelength beam combining method, achieving significant power density and increased scanning speed, which doubles the productivity compared to traditional laser methods.
- The resulting laser annealing produced crystal grains ranging from 2 to 15 μm with a 100% crystallization rate and low resistivity, demonstrating a geometric rather than arithmetic increase in production capacity with higher laser power.
