A Comparative Study of Divergent Surface Acoustic Wave Beams' Generation on an Y128° Lithium Niobate Using Various Types of Interdigital Transducers.

This study focuses on the possibility of generating divergent surface acoustic waves (SAWs) with interdigital transducers (IDTs) deposited on Y128° Lithium Niobate for non-destructive testing applications, particularly in the context of manufacturing layer-on-substrate systems for microelectronic components. The selected approach is to diffuse the SAWs over a large surface area and in various directions in order to analyze the structure and detect any defects when using the well-known passive imaging by correlating the diffuse acoustic field. The introduction of SAWs is achieved using offset interdigital transducers that make acoustic contact with the sample under analysis without causing damage.