Machine Learning-Based Modeling of pH-Sensitive Silicon Nanowire (SiNW) for Ion Sensitive Field Effect Transistor (ISFET).

The development of ion-sensitive field-effect transistor (ISFET) sensors based on silicon nanowires (SiNW) has recently seen significant progress, due to their many advantages such as compact size, low cost, robustness and real-time portability. However, little work has been done to predict the performance of SiNW-ISFET sensors. The present study focuses on predicting the performance of the silicon nanowire (SiNW)-based ISFET sensor using four machine learning techniques, namely multilayer perceptron (MLP), nonlinear regression (NLR), support vector regression (SVR) and extra tree regression (ETR).