Generation of Reference Softgauges for Minimum Zone Fitting Algorithms: Case of Aspherical and Freeform Surfaces.

Optical aspherical lenses with high surface quality are increasingly demanded in several applications in medicine, synchrotron, vision, etc. To reach the requested surface quality, most advanced manufacturing processes are used in closed chain with high precision measurement machines. The measured data are analysed with least squares (LS or L-norm) or minimum zone (MZ) fitting (also Chebyshev fitting or L-norm) algorithms to extract the form error.

Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level.

The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines.