Microwave surface and Lamb waves in a multilayered piezoelectric "Al-IDT/(AlSc)N/(001)[110] diamond" structure designed as a SAW resonator were studied using both the experimental and modeling methods. In this structure, it is possible to generate Rayleigh, surface horizontal (SH) and Lamb waves simultaneously. The successful excitation of Lamb waves at operating frequencies up to 20 GHz has been obtained.
View Article and Find Full Text PDFFeatures of an application of a High-overtone Bulk Acoustic Resonator (HBAR) as a high-pressure sensor have been considered. In this way, the second version of an integrated measurement system combining a Diamond Anvil Cell (DAC) and an HBAR operating in the microwave frequency band from 1.3 to 3.
View Article and Find Full Text PDFThe application of microwave diamond-based HBAR as a sensor of microwave acoustic attenuation α was considered, using the Mo film as an object of research. A multilayered piezoelectric structure, as the Al/AlScN/Mo/(100) diamond/Mo, was produced using aluminum-scandium nitride composition, and was studied in detail for a number of the Mo films with different thicknesses obtained by magnetron deposition. The operational frequency band of 3.
View Article and Find Full Text PDF