High-finesse cavities fabricated by buckling self-assembly of a-Si/SiO2 multilayers.

Arrays of half-symmetric Fabry-Perot micro-cavities were fabricated by controlled formation of circular delamination buckles within a-Si/SiO(2) multilayers. Cavity height scales approximately linearly with diameter, in reasonable agreement with predictions based on elastic buckling theory. The measured finesse (F > 10(3)) and quality factors (Q > 10(4) in the 1550 nm range) are close to reflectance limited predictions, indicating that the cavities have low roughness and few defects.

Hollow Bragg waveguides fabricated by controlled buckling of Si/SiO2 multilayers.

We describe integrated air-core waveguides with Bragg reflector claddings, fabricated by controlled delamination and buckling of sputtered Si/SiO2 multilayers. Thin film deposition parameters were tailored to produce a desired amount of compressive stress, and a patterned, embedded fluorocarbon layer was used to define regions of reduced adhesion. Self-assembled air channels formed either spontaneously or upon heating-induced decomposition of the patterned film.

Thermal tuning of hollow waveguides fabricated by controlled thin-film buckling.

We describe the thermal tuning of air-core Bragg waveguides, fabricated by controlled formation of delamination buckles within a multilayer stack of chalcogenide glass and polymer. The upper cladding mirror is a flexible membrane comprising high thermal expansion materials, enabling large tuning of the air-core dimensions for small changes in temperature. Measurements on the temperature dependence of feature heights showed good agreement with theoretical predictions.

Chip-scale spectrometry based on tapered hollow Bragg waveguides.

We describe a micro-spectrometer that exploits out-of-plane radiation at mode cutoff in a tapered leaky waveguide clad by omnidirectional Bragg reflectors. The device can be viewed as a side-coupled, tapered Fabry-Perot cavity. An effective-index transfer-matrix model reveals that optimal resolution is dependent on the reduction or mitigation of back-reflection and standing waves leading up to the cutoff point.

Out-of-plane coupling at mode cutoff in tapered hollow waveguides with omnidirectional reflector claddings.

We describe the theoretical and experimental analysis of light propagation in tapered, air-core waveguides with omnidirectional reflector claddings. For light within the omnidirectional band, nearly vertical out-ofplane radiation at wavelength-dependent positions along the length of the taper was observed. The coupling positions correspond to the core sizes at which individual modes approach cutoff.