Effects of interface-engineering on the internal structure and reflective characteristics of Cr/Sc multilayer mirrors.

Record reflectivity's of R=23.8% at 3.14 nm and R=30.

Al/Zr-based multilayer mirrors with record-breaking reflectivity.

The paper reports on a new Zr/Be/Si/Al multilayer structure that provides record reflectances of up to 67% and a spectral resolution of Δλ = 0.63 nm (λ / Δλ ≈ 27) in the spectral range of 17-20 nm. It is shown that the structure has a high temporal stability of extreme ultraviolet (EUV) optical characteristics.

The diamond-silicon carbide composite Skeleton as a promising material for substrates of intense X-ray beam optics.

The paper considers the possibility of using the diamond-silicon carbide composite Skeleton with a technological coating of polycrystalline silicon as a substrate for X-ray mirrors used with powerful synchrotron radiation sources (third+ and fourth generation). Samples were studied after polishing to provide the following surface parameters: root-mean-square flatness ≃ 50 nm, micro-roughness on the frame 2 µm × 2 µm σ ≃ 0.15 nm.

Stress, reflectance, and stability of Ru/Be multilayer coatings with Mo interlayers near the 11 nm wavelength.

The stress, reflectance, and temporal stability of Ru/Be multilayer mirrors, both with and without Mo interlayers, were studied. A Ru/Be MLM was found to have zero stress at a Ru layer thickness-to-period ratio of γ ∼ 0.4.

Investigation of structural and reflective characteristics of short-period Mo/BC multilayer X-ray mirrors.

The results of a study of the structural and reflective characteristics of short-period multilayer X-ray mirrors based on Mo/BC at wavelengths 1.54 Å, 9.89 Å and 17.